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Wafer Loader AL120 Specifications*1
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200 mm Type
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200 mm / 150 mm Convertible Type
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150 mm Type
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AL120-
LMB8-
90
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AL120-
LMB86-
180
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AL120-
L86-
180
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AL120-
LMB86
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AL120-
L86
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AL120-
LMB6-
150
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AL120-
L6-
150
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Wafer Size (SEMI Standard)
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200mm
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200mm / 150mm
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150mm /
125mm /
100mm
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Minimum Wafer Thickness
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90µm
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180µm
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400µm
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150µm
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Type of Cassette*2
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SEMI stad. 25 (26)-slot
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Number of Cassette
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1
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Inspection Recipe
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All / Sampling
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Inspection Sequence
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Micro (Microscope)
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YES
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YES
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YES
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YES
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YES
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YES
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YES
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Top Macro
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YES
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YES
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YES
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YES
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Back Macro
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YES
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YES
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YES
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YES
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2nd. Back Macro
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YES
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YES
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YES
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YES
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Wafer Orientation (Every 90°)
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Non-contact (O.F./Notch)
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Non-contact (O.F.)
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External Control*3
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YES
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YES
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YES
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YES
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YES
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YES
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YES
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Compatible Microscope Model
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Olympus Semiconductor Inspection Microscope MX61
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Dimensions (mm)
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640 (W) x 620 (D) x 378 (H) Body Only, 1100 (W) x 620 (D) x 378 (H) with Microscope
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570 (W) x 620 (D) x 400 (H) Body Only, 980 (W) x 620 (D) x 400 (H) with Microscope
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Weight (kg) (Main Body Only)
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44
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44
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41
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44
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41
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40
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37
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Utility (Power Consumption/Vacuum)
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AC100 V - 120 V, 1 A, or AC 220 V - 240 V, 0.5 A 50/60 Hz, -67 to -80 kpa, 20 Liter/min or higher
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