|
Total magnification
|
54x - 17,280x
|
|
Field of view
|
16um - 5,120um
|
|
Measurement principle
|
Optical system
|
Reflection-type confocal laser scanning laser microscope
Reflection-type confocal laser scanning laser-DIC microscope
Color
Color-DIC
|
|
|
Light receiving element
|
Laser: Photomultiplier (2ch)
Color: CMOS color camera
|
|
Height measurement
|
Display resolution
|
0.5nm
|
|
|
Dynamic range
|
16 bits
|
|
|
Repeatability σn-1*1 *2 *6
|
20x: 0.03μm, 50x: 0.012μm, 100x: 0.012μm
|
|
|
Accuracy *1 *3 *6
|
0.15+L/100μm (L:Measuring length[mm])
|
|
|
Accuracy for stitched image *1 *4 *6
|
20x: 15+0.5Lμm, 50x: 9+0.5Lμm, 100x: 7+0.5Lμm (L:Stitching length[μm])
|
|
|
Measurement noise (Sq noise) *1 *5 *6
|
1nm
|
|
Width measurement
|
Display resolution
|
1nm
|
|
|
Repeatability 3σn-1 *1 *6
|
20x: 0.05μm, 50x: 0.04μm, 100x: 0.02μm
|
|
|
Accuracy *1 *3 *6
|
Measurement value +/- 1.5%
|
|
|
Accuracy for stitched image *1 *3 *6
|
20x: 15+0.5Lμm, 50x: 9+0.5Lμm, 100x: 7+0.5Lμm (L:Stitching length[mm])
|
|
Maximum number of measuring points in a single measurement
|
4096 x 4096 pixel
|
|
Maximum number of measuring points
|
36 Mpixel
|
|
XY stage configuration
|
Length measurement module
|
•
|
NA
|
NA
|
•
|
NA
|
|
|
Operating range
|
100 x 100mm Motorized
|
100 x 100mm Manual
|
300 x 300 mm Motorized
|
100 x 100mm Motorized
|
100 x 100mm Manual
|
|
Maximum sample height
|
100mm
|
30mm
|
37mm
|
210mm
|
140mm
|
|
Laser light source
|
Wavelength
|
405nm
|
|
|
Maximum output
|
0.95 mW
|
|
|
Laser class
|
Class 2 (IEC60825-1:2007, IEC60825-1:2014)
|
|
Color light source
|
White LED
|
|
Electrical power
|
240 W
|
240 W
|
278 W
|
240 W
|
240 W
|
|
Mass
|
Microscope body
|
Approx. 31 kg
|
Approx. 32 kg
|
Approx. 50 kg
|
Approx. 43 kg
|
Approx. 44 kg
|
|
|
Control box
|
Approx. 12 kg
|
